Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6983756 | Substrate treatment process and apparatus | Masao Iga | 2006-01-10 |
| 6874516 | Substrate cleaning apparatus | Masao Iga, Takeji Ueda, Jun Kanayasu, Satoshi Shikami | 2005-04-05 |
| 6743301 | Substrate treatment process and apparatus | Masao Iga | 2004-06-01 |