Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11682568 | Substrate treatment apparatus and manufacturing method of semiconductor device | Yuji Hashimoto, Hiroshi Fujita | 2023-06-20 |
| 11676828 | Semiconductor manufacturing apparatus and manufacturing method of semiconductor device | Shinsuke Muraki | 2023-06-13 |
| 11610789 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Katsuhiro Sato, Hiroshi Fujita, Yoshinori Kitamura, Tomohiko Sugita | 2023-03-21 |
| 11469119 | Substrate treatment apparatus | Yoshinori Kitamura, Katsuhiro Sato | 2022-10-11 |
| 11171020 | Substrate treatment apparatus | Katsuhiro Sato, Hiroaki ASHIDATE, Shinsuke Muraki, Yuji Hashimoto | 2021-11-09 |
| 11069700 | Semiconductor storage device and method of manufacturing the same | Koichi Sakata, Kazutaka Suzuki, Hiroaki ASHIDATE, Katsuhiro Sato | 2021-07-20 |
| 10978316 | Semiconductor processing device | Tomohiko Sugita, Shinsuke Kimura, Hiroaki ASHIDATE, Katsuhiro Sato | 2021-04-13 |