Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11990348 | Wafer processing apparatus and wafer processing method using the same | Chanyeong Jeong, Hoseop Choi, Sunggil Kang, Dongkyu Shin | 2024-05-21 |
| 11289308 | Apparatus and method for processing substrate and method of manufacturing semiconductor device using the method | Minseop PARK, Chanyeong Jeong, Sunggil Kang, Yeongkwang Lee | 2022-03-29 |