RW

Robert J. Whiting

NS Novellus Systems: 1 patents #479 of 780Top 65%
Overall (All Time): #3,561,206 of 4,157,543Top 90%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6468384 Predictive wafer temperature control system and method Vikram Singh, Paul Shufflebotham, Ajay Saproo 2002-10-22