Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7959970 | System and method of removing chamber residues from a plasma processing system in a dry cleaning process | Marcel Gaudet, Aelan Mosden | 2011-06-14 |
| 7183183 | Method for using ion implantation to treat the sidewalls of a feature in a low-k dielectric film | Kenneth Duerksen, David C. Wang | 2007-02-27 |
| 5569355 | Method for fabrication of microchannel electron multipliers | Alan M. Then, Steven M. Shank, G. William Tasker | 1996-10-29 |
| 5568013 | Micro-fabricated electron multipliers | Alan M. Then, Gregory L. Snider, G. William Tasker | 1996-10-22 |
| 5544772 | Fabrication of a microchannel plate from a perforated silicon | Alan M. Then, Steven M. Shank, G. William Tasker | 1996-08-13 |
| 5087322 | Selective metallization for high temperature semiconductors | David Lillienfeld, David C. Thomas, Paul Smith, Gerald Comeau | 1992-02-11 |