Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9772289 | System and method for defect detection and photoluminescence measurement of a sample | — | 2017-09-26 |
| 9410890 | Methods and apparatus for spectral luminescence measurement | — | 2016-08-09 |
| 9354177 | System and method for defect detection and photoluminescence measurement of a sample | — | 2016-05-31 |
| 8736831 | Substrate inspection | Mahendra Prabhu Ramachandran, Steven W. Meeks | 2014-05-27 |
| 7847954 | Measuring the shape and thickness variation of a wafer with high slopes | Shouhong Tang | 2010-12-07 |
| 7554654 | Surface characteristic analysis | Steven W. Meeks, Tom Carr | 2009-06-30 |
| 7505143 | Dynamic reference plane compensation | Harald F. Hess, Thomas D. Carr | 2009-03-17 |