Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5916012 | Control of chemical-mechanical polishing rate across a substrate surface for a linear polisher | Anil K. Pant, Joseph R. Breivogel, Douglas W. Young | 1999-06-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5916012 | Control of chemical-mechanical polishing rate across a substrate surface for a linear polisher | Anil K. Pant, Joseph R. Breivogel, Douglas W. Young | 1999-06-29 |