RR

Robert M. Rivera

Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #3,652,366 of 4,157,543Top 90%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5916012 Control of chemical-mechanical polishing rate across a substrate surface for a linear polisher Anil K. Pant, Joseph R. Breivogel, Douglas W. Young 1999-06-29