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Edge removal of silicon-on-insulator transfer wafer |
Raymond John Donohoe, Krishna Vepa, Paul V. Miller, Hong Wang |
2011-05-31 |
| 7775856 |
Method for removal of surface films from reclaim substrates |
Yashraj Bhatnagar, Krishna Vepa |
2010-08-17 |
| 7659206 |
Removal of silicon oxycarbide from substrates |
Krishna Vepa, Yashraj Bhatnagar, Venkata R. Balagani |
2010-02-09 |
| 7657390 |
Reclaiming substrates having defects and contaminants |
Krishna Vepa, Yashraj Bhatnagar, Hong Wang |
2010-02-02 |
| 7456113 |
Cleaning method and solution for cleaning a wafer in a single wafer process |
Steven Verhaverbeke, Hong Wang |
2008-11-25 |
| 7402520 |
Edge removal of silicon-on-insulator transfer wafer |
Raymond John Donohoe, Krishna Vepa, Paul V. Miller, Hong Wang |
2008-07-22 |
