RH

Rick M. Heathwaite

SF S.C. Fluids: 2 patents #7 of 11Top 65%
Overall (All Time): #2,205,010 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6612317 Supercritical fluid delivery and recovery system for semiconductor wafer processing Michael Costantini, Mohan Chandra, Heiko Moritz, Ijaz Jafri, David Mount 2003-09-02
6602349 Supercritical fluid cleaning process for precision surfaces Mohan Chandra, David Mount, Michael Costantini, Heiko Moritz, Ijaz Jafri +1 more 2003-08-05