Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432841 | Method for forming a dielectric | Li Li, Randhir P. S. Thakur | 2002-08-13 |
| 6399504 | Methods and etchants for etching oxides of silicon with low selectivity | Whonchee Lee, Li Li, Pai-Hung Pan | 2002-06-04 |
| 6235145 | System for wafer cleaning | Li Li, Donald L. Westmoreland, Kevin J. Torek | 2001-05-22 |
| 6210489 | Methods and etchants for etching oxides of silicon with low selectivity | Whonchee Lee, Li Li, Pai-Hung Pan | 2001-04-03 |
| 6207587 | Method for forming a dielectric | Li Li, Randhir P. S. Thakur | 2001-03-27 |
| 6029680 | Method for in situ removal of particulate residues resulting from cleaning treatments | Whonchee Lee | 2000-02-29 |
| 6010949 | Method for removing silicon nitride in the fabrication of semiconductor devices | Li Li, Zhiqiang Wu, Elvia M. Hawthorne | 2000-01-04 |
| 5990019 | Selective etching of oxides | Kevin J. Torek, Whonchee Lee | 1999-11-23 |
| 5928969 | Method for controlled selective polysilicon etching | Li Li | 1999-07-27 |
| 5785875 | Photoresist removal process using heated solvent vapor | Jonathan Morgan, Li Li | 1998-07-28 |
| 5783495 | Method of wafer cleaning, and system and cleaning solution regarding same | Li Li, Donald L. Westmoreland, Kevin J. Torek | 1998-07-21 |
| 5770263 | Method for in situ removal of particulate residues resulting from hydrofluoric acid cleaning treatments | Whonchee Lee | 1998-06-23 |
| 5749975 | Process for dry cleaning wafer surfaces using a surface diffusion layer | Li Li | 1998-05-12 |
| 5716535 | Methods and etchants for etching oxides of silicon with low selectivity | Whonchee Lee, Li Li, Pai-Hung Pan | 1998-02-10 |
| 5685951 | Methods and etchants for etching oxides of silicon with low selectivity in a vapor phase system | Kevin J. Torek, Whonchee Lee | 1997-11-11 |
| 5264396 | Method for enhancing nitridation and oxidation growth by introducing pulsed NF.sub.3 | Randhir P. S. Thakur, Annette L. Martin, Gurtej S. Sandhu | 1993-11-23 |