Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9273952 | Grazing and normal incidence interferometer having common reference surface | Dieter Mueller, Daniel Kavaldjiev | 2016-03-01 |
| 8786842 | Grazing and normal incidence interferometer having common reference surface | Dieter Muller, Daniel Kavaldjiev | 2014-07-22 |
| 7719294 | Systems configured to perform a non-contact method for determining a property of a specimen | Amin Samsavar, John M. Schmidt, Gregory S. Horner, Thomas G. Miller, Zhiwei Xu +3 more | 2010-05-18 |
| 7538333 | Contactless charge measurement of product wafers and control of corona generation and deposition | Amin Samsavar, John M. Schmidt, Gregory S. Horner, Thomas G. Miller, Zhiwei Xu +3 more | 2009-05-26 |
| 7248062 | Contactless charge measurement of product wafers and control of corona generation and deposition | Amin Samsavar, John M. Schmidt, Gregory S. Horner, Thomas G. Miller, Zhiwei Xu +3 more | 2007-07-24 |
| 7173715 | Reduced coherence symmetric grazing incidence differential interferometer | Dieter Mueller, Daniel Kavaldjiev | 2007-02-06 |
| 7057741 | Reduced coherence symmetric grazing incidence differential interferometer | Dieter Mueller, Daniel Kavaldjiev | 2006-06-06 |