Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607832 | Method and apparatus for forming a thin layer | Junyeong Lee, Soonwook Jung, Bongjin Kuh, Sukjin Chung | 2020-03-31 |
| 10262841 | Plasma monitoring device | Sung Ho Kang, Ki-Chul Kim, Un Ki Kim, Yong Hun Lee, Jae Hee Lee +3 more | 2019-04-16 |
| 10037870 | Method for preparing hydrogen plasma annealing treatment, method for performing hydrogen plasma annealing treatment, and apparatus therefor | Sung Ho Kang, Ki-Chul Kim, Yong Hun Lee, Sun-Young Lee, Un Ki Kim | 2018-07-31 |