PS

Phillip Spaull

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
📍 Yokote, JP: #14 of 26 inventorsTop 55%
Overall (All Time): #3,455,078 of 4,157,543Top 85%
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Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6925731 Thin film forming apparatus cleaning method Kazuaki Nishimura, Yukio Tojo, Kenji Tago 2005-08-09