Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11688630 | Shallow trench isolation filling structure in semiconductor device | — | 2023-06-27 |
| 10816896 | Method for manufacturing imprinting template substrate, imprinting template substrate, imprinting template, and method for manufacturing semiconductor apparatus | — | 2020-10-27 |
| 10359697 | Imprinting template substrate, method for manufacturing the same, imprinting template substrate manufacturing apparatus, and method for manufacturing semiconductor apparatus | — | 2019-07-23 |
| 10249545 | Method for processing substrate including forming a film on a silicon-containing surface of the substrate to prevent resist from extruding from the substrate during an imprinting process | — | 2019-04-02 |
| 8435353 | Thin film forming apparatus and method | — | 2013-05-07 |
| 7857952 | Method for treating the surface of object and apparatus thereof | Hideo Yoshida, Seizo Miyata, Masato Sone | 2010-12-28 |
| 7854168 | Thickness measuring device for vessel steel plate | Kazuhiro Nojiri, Hiroyuki Haga, Jiro Nakayama, Yuji Nishimura | 2010-12-21 |
| 7736442 | Method for activating surface of base material and apparatus thereof | Hideo Yoshida, Takeshi Sako, Masato Sone, Kentaro Abe, Kiyohito Sakon | 2010-06-15 |
| 7513161 | Device for measuring thickness of vessel steel plate | Kazuhiro Nojiri, Hiroyuki Haga, Jiro Nakayama, Yuji Nishimura | 2009-04-07 |
| 7371659 | Substrate laser marking | Haruhiko Yamamoto, Hideaki Seto, Kyoko Kuroki | 2008-05-13 |
| 7323096 | Method for treating the surface of object and apparatus thereof | Hideo Yoshida, Seizo Miyata, Masato Sone | 2008-01-29 |
| 7300527 | Method for activating surface of base material and apparatus thereof | Hideo Yoshida, Takeshi Sako, Masato Sone, Kentaro Abe, Kiyohito Sakon | 2007-11-27 |
| 7143011 | System for diagnosing facility apparatus, managing apparatus and diagnostic apparatus | Osamu Yoshie, Tatsuya Fukunaga | 2006-11-28 |
| 7139681 | System for diagnosing facility apparatus, managing apparatus and diagnostic apparatus | Osamu Yoshie, Tatsuya Fukunaga | 2006-11-21 |
| 7085684 | System for diagnosing a facility apparatus | Osamu Yoshie, Tatsuya Fukunaga | 2006-08-01 |
| 6830775 | Method of manufacturing superconducting quantum interference type magnetic fluxmeter | Masaharu Kawachi, Masahito Yoshizawa | 2004-12-14 |
| 6691576 | Thickness measuring device for cylindrical tank bottom plate | Kazuhiro Nojiri, Tatsuya Fukunaga, Fuminori Kiyota, Ryota Kajiki, Yuji Nishimura | 2004-02-17 |
| 6299723 | Anti-airlock apparatus for filters | Hideaki Seto, Haruhiko Yamamoto, Kyoko Saito | 2001-10-09 |
| 6276379 | Anti-microbubble deposition apparatus | Hideaki Seto, Haruhiko Yamamoto, Kyoko Saito | 2001-08-21 |
| 6248180 | Method for removing particles from a semiconductor wafer | Hideaki Seto, Koji Ohsawa, Haruhiko Yamamoto | 2001-06-19 |
| 6156676 | Laser marking of semiconductor wafer substrate while inhibiting adherence to substrate surface of particles generated during laser marking | Hiroshi Ohsawa, Hitoshi Hasegawa | 2000-12-05 |
| 6032529 | Liquid level sensor for buffered hydrofluoric acid | Kyoko Saito, Hisashi Fujimoto, Hideaki Seto, Haruhiko Yamamoto | 2000-03-07 |
| 5605867 | Method of manufacturing insulating film of semiconductor device and apparatus for carrying out the same | Tomohiro Ohta, Tadashi Nakano, Hiroshi Yamamoto | 1997-02-25 |
| 5532191 | Method of chemical mechanical polishing planarization of an insulating film using an etching stop | Tadashi Nakano, Tomohiro Ohta, Hiroshi Yamamoto | 1996-07-02 |
| 5507865 | Aqueous ink | Naohiro Yoshida | 1996-04-16 |