Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11005065 | Laminate comprising tantalum oxide and method of producing the same, gas barrier film and method of producing the same, and organic light-emitting element | Jin Sato, Mitsuru Kano, Hiroshi Koyama | 2021-05-11 |
| 7371659 | Substrate laser marking | Haruhiko Yamamoto, Hideaki Seto, Nobuyoshi Sato | 2008-05-13 |
| 7201176 | Wafer chucking apparatus for spin processor | Hideaki Seto | 2007-04-10 |
| 7056392 | Wafer chucking apparatus and method for spin processor | Hideaki Seto | 2006-06-06 |