Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7371659 | Substrate laser marking | Haruhiko Yamamoto, Nobuyoshi Sato, Kyoko Kuroki | 2008-05-13 |
| 7201176 | Wafer chucking apparatus for spin processor | Kyoko Kuroki | 2007-04-10 |
| 7056392 | Wafer chucking apparatus and method for spin processor | Kyoko Kuroki | 2006-06-06 |
| 6299723 | Anti-airlock apparatus for filters | Haruhiko Yamamoto, Nobuyoshi Sato, Kyoko Saito | 2001-10-09 |
| 6276379 | Anti-microbubble deposition apparatus | Haruhiko Yamamoto, Nobuyoshi Sato, Kyoko Saito | 2001-08-21 |
| 6248180 | Method for removing particles from a semiconductor wafer | Nobuyoshi Sato, Koji Ohsawa, Haruhiko Yamamoto | 2001-06-19 |
| 6032529 | Liquid level sensor for buffered hydrofluoric acid | Kyoko Saito, Hisashi Fujimoto, Haruhiko Yamamoto, Nobuyoshi Sato | 2000-03-07 |
| 5998322 | Filter medium for molten metals | Kazutomo Hoshino, Toshiya Kunisaki, Yukio Kai, Atsushi Kikuchi, Yukihisa Shiraishi +1 more | 1999-12-07 |