Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635154 | Method and apparatus for multi-target sputtering | Paul M. Johnson, Robert Ruck, Nathan J. Fo | 2003-10-21 |
| 5873989 | Methods and apparatus for linear scan magnetron sputtering | John L. Hughes, Gary A. Davis, Robert J. Kolenkow, Carl T. Petersen, Robert E. Weiss | 1999-02-23 |
| 5295175 | Method and apparatus for generating high intensity radiation | — | 1994-03-15 |
| 5173931 | High-intensity x-ray source with variable cooling | — | 1992-12-22 |