Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5493116 | Detection system for precision measurements and high resolution inspection of high aspect ratio structures using particle beam devices | Guillermo L. Toro-Lira, Alan H. Achilles, Kevin M. Monahan, Philip R. Rigg | 1996-02-20 |