Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7883840 | Developing method and method for fabricating semiconductor device using the developing method | Hidekazu Kitahara, Kenji Noda, Kenichi Asahi, Hirofumi Fukumoto | 2011-02-08 |
| 7838185 | Focus measurement method and method of manufacturing a semiconductor device | Rimiko Ide, Kenji Noda, Hirofumi Fukumoto, Kenichi Asahi | 2010-11-23 |
| 7474382 | Method for determining focus deviation amount in pattern exposure and pattern exposure method | Hirofumi Fukumoto, Ken-ichi Asahi, Fumio Iwamoto | 2009-01-06 |