Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5739909 | Measurement and control of linewidths in periodic structures using spectroscopic ellipsometry | Arnaud Grevoz, Tseng-Chung Lee | 1998-04-14 |
| 5494697 | Process for fabricating a device using an ellipsometric technique | Dale E. Ibbotson, Tseng-Chung Lee | 1996-02-27 |