Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5739909 | Measurement and control of linewidths in periodic structures using spectroscopic ellipsometry | Nadine Blayo, Tseng-Chung Lee | 1998-04-14 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5739909 | Measurement and control of linewidths in periodic structures using spectroscopic ellipsometry | Nadine Blayo, Tseng-Chung Lee | 1998-04-14 |