Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12235287 | Substrate processing apparatus | Daesung Jung, Meehyun Lim | 2025-02-25 |
| 11823927 | Wafer inspection apparatus and system including the same | Kyunghun Han, Ingi Kim, Sangwoo Bae, Jungchul Lee, Minhwan Seo +3 more | 2023-11-21 |