| 7167229 |
Liquid crystal display element and projection display device |
Akiko Toriyama |
2007-01-23 |
| 7123336 |
Twisted nematic liquid crystal material with certain values for dielectric constant anisotropy, twisted elasticity modulus and refractive index anisotropy |
Akiko Toriyama |
2006-10-17 |
| 6951512 |
Chemical mechanical polishing apparatus and method of chemical mechanical polishing |
Yasuaki Tsuchiya |
2005-10-04 |
| 6783446 |
Chemical mechanical polishing apparatus and method of chemical mechanical polishing |
Yasuaki Tsuchiya |
2004-08-31 |
| 6551914 |
Method of forming polish stop by plasma treatment for interconnection |
Akira Kubo |
2003-04-22 |
| 6361708 |
Method and apparatus for polishing a metal film |
Akira Kubo |
2002-03-26 |
| 6235071 |
Chemical mechanical polishing method for highly accurate in-plane uniformity in polishing rate over position |
Yasuaki Tsuchiya |
2001-05-22 |
| 6110014 |
Method and apparatus polishing wafer for extended effective area of wafer |
— |
2000-08-29 |
| 6054383 |
Fabrication method of semiconductor device |
Tetsuya Homma |
2000-04-25 |
| 5904558 |
Fabrication process of semiconductor device |
— |
1999-05-18 |
| 5607880 |
Method of fabricating multilevel interconnections in a semiconductor integrated circuit |
Tetsuya Homma |
1997-03-04 |
| 5491108 |
Method of producing semiconductor integrated circuit device having interplayer insulating film covering substrate |
Tetsuya Homma, Yukinobu Murao, Takaho Tanigawa, Hiroki Koga |
1996-02-13 |
| 5420075 |
Forming multi-layered interconnections with fluorine compound treatment permitting selective deposition of insulator |
Tetsuya Homma |
1995-05-30 |
| 5332694 |
Process for manufacturing a semiconductor device |
— |
1994-07-26 |
| 4552633 |
Fine particulate for use in clinical testing and a process for producing thereof |
Minoru Kumakura, Isao Kaetsu, Masakazu Adachi |
1985-11-12 |