MS

Michael Smigel

SP Speedfam-Ipec: 3 patents #33 of 143Top 25%
NS Novellus Systems: 1 patents #479 of 780Top 65%
Overall (All Time): #1,250,874 of 4,157,543Top 35%
4
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7354335 CMP apparatus and load cup mechanism David Marquardt, Joe Koeth, James J. Crawford, James Ekberg, Antoni F. Jakubiec +1 more 2008-04-08
6979034 Workpiece handling end-effector and a method for processing workpieces using a workpiece handling end-effector Randy McNurlin, Mark Maggio, Ann Wilkey, James L. Farmer, Shawn Robertson 2005-12-27
6752442 Workpiece handling end-effector and a method for processing workpieces using a workpiece handling end-effector Randy McNurlin, Mark Maggio, Ann Wilkey, James L. Farmer, Shawn Robertson 2004-06-22
6567725 Method and apparatus for teaching robot station location Ann Wilkey, Richard Stewart 2003-05-20