Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11327411 | Substrate processing apparatus and article manufacturing method | Kenichi Kamino, Kashu Matsumoto | 2022-05-10 |
| 11112701 | Control device, control method, lithographic apparatus, method of manufacturing article, and storage medium | Junichi Motojima | 2021-09-07 |
| 11048176 | Substrate processing apparatus and article manufacturing method | Kenichi Kamino, Kashu Matsumoto | 2021-06-29 |
| 10635005 | Exposure apparatus, method thereof, and method of manufacturing article | Masatoshi Endo, Junichi Motojima | 2020-04-28 |
| 10558128 | Control device, lithography apparatus, and method of manufacturing article | Koji Yoshida, Junichi Motojima, Yoshihiro Omameuda | 2020-02-11 |
| 10133177 | Exposure apparatus, exposure method, and article manufacturing method | — | 2018-11-20 |