Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10558128 | Control device, lithography apparatus, and method of manufacturing article | Koji Yoshida, Junichi Motojima, Mitsuhide Nishimura | 2020-02-11 |
| 9541845 | Exposure method, exposure apparatus, and method of manufacturing device | — | 2017-01-10 |
| 8319942 | Exposure apparatus and device fabrication method | Shin Takano, Hideki Matsumoto | 2012-11-27 |