Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11327411 | Substrate processing apparatus and article manufacturing method | Mitsuhide Nishimura, Kashu Matsumoto | 2022-05-10 |
| 11048176 | Substrate processing apparatus and article manufacturing method | Mitsuhide Nishimura, Kashu Matsumoto | 2021-06-29 |