Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7812542 | Arrangement and method for the generation of extreme ultraviolet radiation by means of an electrically operated gas discharge | Guido Hergenhan, Christian Ziener | 2010-10-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7812542 | Arrangement and method for the generation of extreme ultraviolet radiation by means of an electrically operated gas discharge | Guido Hergenhan, Christian Ziener | 2010-10-12 |