Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10714354 | Self limiting lateral atomic layer etch | Tom A. Kamp, Neema Rastgar | 2020-07-14 |
| 9620376 | Self limiting lateral atomic layer etch | Tom A. Kamp, Neema Rastgar | 2017-04-11 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10714354 | Self limiting lateral atomic layer etch | Tom A. Kamp, Neema Rastgar | 2020-07-14 |
| 9620376 | Self limiting lateral atomic layer etch | Tom A. Kamp, Neema Rastgar | 2017-04-11 |