Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776691 | Polishing/cleaning method as well as method of making a wiring section using a polishing apparatus | Matsuomi Nishimura, Kazuo Takahashi, Osamu Ikeda | 2004-08-17 |
| 6629882 | Precise polishing apparatus and method | Kazuo Takahashi, Matsuomi Nishimura, Shinzo Uchiyama, Takashi Kamono | 2003-10-07 |
| 6551172 | Polishing apparatus and polishing method | Masaru Nyui, Takehiko Suzuki, Yasushi Sugiyama | 2003-04-22 |
| 6503361 | Polishing method and polishing apparatus using the same | Masaru Nyui | 2003-01-07 |
| 6390903 | Precise polishing apparatus and method | Kazuo Takahashi, Matsuomi Nishimura, Shinzo Uchiyama, Takashi Kamono | 2002-05-21 |
| 6332835 | Polishing apparatus with transfer arm for moving polished object without drying it | Matsuomi Nishimura, Kazuo Takahashi, Osamu Ikeda | 2001-12-25 |
| 6165050 | Method of manufacturing semiconductor device using precision polishing apparatus with detecting means | Matsuomi Nishimura, Kazuo Takahashi | 2000-12-26 |
| 6149500 | Precision polishing method using hermetically sealed chambers | Kazuo Takahashi, Matsuomi Nishimura | 2000-11-21 |
| 6142855 | Polishing apparatus and polishing method | Masaru Nyui, Takehiko Suzuki, Yasushi Sugiyama | 2000-11-07 |
| 6137575 | Film thickness measuring method and apparatus | Yasushi Sugiyama, Takehiko Suzuki, Masaru Nyui | 2000-10-24 |
| 6093081 | Polishing method and polishing apparatus using the same | Masaru Nyui, Kazuo Takahashi | 2000-07-25 |
| 6038068 | Aberration correction system and astronomical telescope having the same | Kunio Takeshi, Yoshiya Matsui, Kyoji Nariai | 2000-03-14 |
| 6012966 | Precision polishing apparatus with detecting means | Matsuomi Nishimura, Kazuo Takahashi | 2000-01-11 |
| 6004187 | Method and apparatus for measuring film thickness and film thickness distribution during polishing | Masaru Nyui | 1999-12-21 |
| 5904611 | Precision polishing apparatus | Kazuo Takahashi, Matsuomi Nishimura | 1999-05-18 |
| 5087121 | Depth/height measuring device | Osamu Kakuchi | 1992-02-11 |
| 4850709 | Fabri-perot spectroscopy method and apparatus utilizing the same | Osamu Kakuchi, Hironori Yamamoto, Masaru Ohtsuka, Osamu SHIBA, Kazuhiko Hara | 1989-07-25 |
| 4787749 | Method and apparatus for measuring the thickness of a thin film using the spectral reflection factor of the film | Yuki Toriumi, Kazuhiko Hara | 1988-11-29 |
| 4711576 | Wave front aberration measuring apparatus | — | 1987-12-08 |
| 4389084 | Observing apparatus | Susumu Ito | 1983-06-21 |
| 4322130 | Phase shifting mirror | Susumu Ito | 1982-03-30 |
| 4294538 | Image forming optical system | — | 1981-10-13 |