Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776691 | Polishing/cleaning method as well as method of making a wiring section using a polishing apparatus | Mikichi Ban, Kazuo Takahashi, Osamu Ikeda | 2004-08-17 |
| 6629882 | Precise polishing apparatus and method | Kazuo Takahashi, Mikichi Ban, Shinzo Uchiyama, Takashi Kamono | 2003-10-07 |
| 6390903 | Precise polishing apparatus and method | Kazuo Takahashi, Mikichi Ban, Shinzo Uchiyama, Takashi Kamono | 2002-05-21 |
| 6352469 | Polishing apparatus with slurry screening | Kyoichi Miyazaki, Kazuo Takahashi | 2002-03-05 |
| 6332835 | Polishing apparatus with transfer arm for moving polished object without drying it | Mikichi Ban, Kazuo Takahashi, Osamu Ikeda | 2001-12-25 |
| 6312316 | Chemical mechanical polishing apparatus and method | Kazuo Takahashi, Kyoichi Miyazaki, Shinzo Uchiyama | 2001-11-06 |
| 6299506 | Polishing apparatus including holder and polishing head with rotational axis of polishing head offset from rotational axis of holder and method of using | Osamu Ikeda, Satoshi Ohta, Shinzo Uchiyama | 2001-10-09 |
| 6183345 | Polishing apparatus and method | Takashi Kamono, Kazuo Takahashi, Osamu Ikeda, Satoshi Ohta | 2001-02-06 |
| 6179695 | Chemical mechanical polishing apparatus and method | Kazuo Takahashi, Kyoichi Miyazaki, Shinzo Uchiyama | 2001-01-30 |
| 6165050 | Method of manufacturing semiconductor device using precision polishing apparatus with detecting means | Mikichi Ban, Kazuo Takahashi | 2000-12-26 |
| 6162112 | Chemical-mechanical polishing apparatus and method | Kyoichi Miyazaki, Kazuo Takahashi | 2000-12-19 |
| 6149500 | Precision polishing method using hermetically sealed chambers | Kazuo Takahashi, Mikichi Ban | 2000-11-21 |
| 6012966 | Precision polishing apparatus with detecting means | Mikichi Ban, Kazuo Takahashi | 2000-01-11 |
| 5904611 | Precision polishing apparatus | Kazuo Takahashi, Mikichi Ban | 1999-05-18 |
| 5788819 | Method for driving liquid, and method and apparatus for mixing and agitation employing the method | Toshikazu Onishi, Kazuo Isaka, Kazumi Tanaka, Takeshi Miyazaki | 1998-08-04 |
| 5601983 | Method for specimen measurement | Hidehito Takayama, Kazumi Tanaka, Toshikazu Ohnishi, Takeshi Miyazaki | 1997-02-11 |
| 5599502 | Liquid moving apparatus and measuring apparatus utilizing the same | Takeshi Miyazaki, Kazuo Isaka, Kazumi Tanaka, Toshikazu Ohnishi, Yoshito Yoneyama +1 more | 1997-02-04 |
| 5495105 | Method and apparatus for particle manipulation, and measuring apparatus utilizing the same | Kazuo Isaka, Tadashi Okamoto, Kazumi Tanaka, Toshikazu Onishi, Takeshi Miyazaki +1 more | 1996-02-27 |
| 5427959 | Apparatus and method for measuring specimen | Kazumi Tanaka, Takeshi Miyazaki, Hidehito Takayama, Toshikazu Ohnishi | 1995-06-27 |
| 5380490 | Apparatus for measuring a test specimen | Hiroaki Hoshi, Kazumi Tanaka, Takeshi Miyazaki, Toshikazu Ohnishi, Hidehito Takayama | 1995-01-10 |
| 5370842 | Sample measuring device and sample measuring system | Takeshi Miyazaki, Takayuki Yagi, Kazumi Tanaka, Toshikazu Ohnishi, Masanori Sakuranaga +3 more | 1994-12-06 |
| 5171969 | Movable film fixing device with heater control responsive to selected sheet size | Shinji Hanada, Takayuki Ishihara, Kazuki Tanaka, Hisaaki Senba, Koji Masuda | 1992-12-15 |
| 4960070 | Developing apparatus | — | 1990-10-02 |