Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136544 | Etch uniformity improvement for single turn internal coil PVD chamber | Anthony Chih-Tung Chan, Adolph Miller Allen, Goichi Yoshidome | 2024-11-05 |
MC
Mehul Chauhan
Overall (All Time): #2,543,692 of 4,157,543Top 65%
1
Patents All Time