Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5614444 | Method of using additives with silica-based slurries to enhance selectivity in metal CMP | János Farkas, Rahul Jairath, Sing-Mo Tzeng | 1997-03-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5614444 | Method of using additives with silica-based slurries to enhance selectivity in metal CMP | János Farkas, Rahul Jairath, Sing-Mo Tzeng | 1997-03-25 |