Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7314823 | Chemical mechanical polishing composition and process | Robert J. Small, Laurence McGhee, David J. Maloney | 2008-01-01 |
| 7276180 | Chemical mechanical polishing composition and process | Robert J. Small, Laurence McGhee, David J. Maloney | 2007-10-02 |
| 7033409 | Compositions for chemical mechanical planarization of tantalum and tantalum nitride | Robert J. Small, Tuan Truong, Melvin Keith Carter, Lily Yao | 2006-04-25 |
| 7033942 | Chemical mechanical polishing composition and process | Robert J. Small, Laurence McGhee, David J. Maloney | 2006-04-25 |
| 6866792 | Compositions for chemical mechanical planarization of copper | Robert J. Small, Tuan Truong, Melvin Keith Carter, Lily Yao | 2005-03-15 |
| 6638326 | Compositions for chemical mechanical planarization of tantalum and tantalum nitride | Robert J. Small, Tuan Truong, Melvin Keith Carter, Lily Yao | 2003-10-28 |
| 6635186 | Chemical mechanical polishing composition and process | Robert J. Small, Laurence McGhee, David J. Maloney | 2003-10-21 |
| 6313039 | Chemical mechanical polishing composition and process | Robert J. Small, Laurence McGhee, David J. Maloney | 2001-11-06 |
| 6251150 | Slurry composition and method of chemical mechanical polishing using same | Robert J. Small, Tuan Troung, Lionel Bonneau, Jean Claude Drouget | 2001-06-26 |
| 6117783 | Chemical mechanical polishing composition and process | Robert J. Small, Laurence McGhee, David J. Maloney | 2000-09-12 |