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Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained |
Simone Sassolini, Marco Del Sarto, Lorenzo Baldo |
2014-03-25 |
| 8193550 |
Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained |
Simone Sassolini, Marco Del Sarto, Lorenzo Baldo |
2012-06-05 |
| 7800234 |
Process for manufacturing deep through vias in a semiconductor device, and semiconductor device made thereby |
Marco Ferrera, Caterina Riva |
2010-09-21 |
| 7595223 |
Process for bonding and electrically connecting microsystems integrated in several distinct substrates |
Ubaldo Mastromatteo, Mauro Bombonati, Daniela Morin, Marta Mottura |
2009-09-29 |
| 7437933 |
Micro-electro-mechanical structure having electrically insulated regions and manufacturing process thereof |
Guido Durante, Simone Sassolini, Marco Ferrera |
2008-10-21 |
| 7399652 |
Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained |
Simone Sassolini, Marco Del Sarto, Lorenzo Baldo |
2008-07-15 |
| 7270003 |
BMEMS-type high-sensitivity inertial sensor and manufacturing process thereof |
Simone Sassolini, Marco Del Sarto, Lorenzo Baldo |
2007-09-18 |
| 7116525 |
Read/write assembly for magnetic hard disks |
Marco Del Sarto, Lorenzo Baldo, Simone Sassolini |
2006-10-03 |