Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8377179 | Moisture control module, process for producing the moisture control module, and apparatus for producing the moisture control module | — | 2013-02-19 |
| 6828573 | Electron beam lithography system | Hajime Kawano, Minoru Wakita, Haruo Yoda | 2004-12-07 |
| 6674086 | Electron beam lithography system, electron beam lithography apparatus, and method of lithography | Haruo Yoda, Minoru Wakita, Hajime Kawano | 2004-01-06 |