| 11640908 |
Method of implanting an implant species into a substrate at different depths |
Joerg Ortner, Dieter Kaiser, Nicolo Morgana, Jens Schneider |
2023-05-02 |
| 10241391 |
Method for processing a carrier, a carrier, an electronic device and a lithographic mask |
Jens Schneider, Henning Feick, Dieter Kaiser |
2019-03-26 |
| 9837280 |
Methods for manufacturing semiconductor devices |
Kurt Sorschag, Daniel Sarlette, Felix Braun, Dieter Kaiser, Ingo Meusel +3 more |
2017-12-05 |
| 9613812 |
Method for processing a carrier, a carrier, an electronic device and a lithographic mask |
Jens Schneider, Henning Feick, Dieter Kaiser |
2017-04-04 |
| 9437440 |
Method for manufacturing a semiconductor device |
Kurt Sorschag, Daniel Sarlette, Felix Braun, Dieter Kaiser, Ingo Meusel +3 more |
2016-09-06 |
| 9029049 |
Method for processing a carrier, a carrier, an electronic device and a lithographic mask |
Jens Schneider, Henning Feick, Dieter Kaiser |
2015-05-12 |
