Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837280 | Methods for manufacturing semiconductor devices | Kurt Sorschag, Felix Braun, Marcel Heller, Dieter Kaiser, Ingo Meusel +3 more | 2017-12-05 |
| 9437440 | Method for manufacturing a semiconductor device | Kurt Sorschag, Felix Braun, Marcel Heller, Dieter Kaiser, Ingo Meusel +3 more | 2016-09-06 |
| 6645683 | Control system and methods for photolithographic processes | Gerhard Luhn | 2003-11-11 |