Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11217442 | Method of depositing a SiN film | — | 2022-01-04 |
| 10309014 | Method of cleaning a plasma processing device | Kathrine Crook, Andrew Price | 2019-06-04 |
| 9783886 | PE-CVD apparatus and method | Daniel Archard, Stephen Burgess, Andrew Price, Keith Edward Buchanan, Katherine Crook | 2017-10-10 |
| 9165762 | Method of depositing silicone dioxide films | Kathrine Crook, Andrew Price, Daniel Archard, Stephen Burgess | 2015-10-20 |
| 8337675 | Method of plasma vapour deposition | Stephen Burgess, Anthony Wilby, Amit Rastogi, Paul Rich, Nicholas Rimmer | 2012-12-25 |