Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11961722 | Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor deposition | Steve Burgess, Ian Moncrieff, Clive Widdicks, Scott Haymore, Rhonda Hyndman | 2024-04-16 |
| 11521840 | Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor deposition | Steve Burgess, Ian Moncrieff, Clive Widdicks, Scott Haymore, Rhonda Hyndman | 2022-12-06 |
| 11127568 | Plasma etching apparatus | Stephen Burgess | 2021-09-21 |
| 10622193 | Plasma etching apparatus | Stephen Burgess | 2020-04-14 |
| 10153135 | Plasma etching apparatus | Stephen Burgess, Ian Moncrieff, Paul Densley, Clive Widdicks, Paul Rich +1 more | 2018-12-11 |
| 9728432 | Method of degassing | Stephen Burgess | 2017-08-08 |
| 8728953 | Method and apparatus for processing a semiconductor workpiece | Stephen Burgess | 2014-05-20 |
| 8454805 | Method of depositing amorphus aluminium oxynitride layer by reactive sputtering of an aluminium target in a nitrogen/oxygen atmosphere | — | 2013-06-04 |
| 8337675 | Method of plasma vapour deposition | Mark Carruthers, Stephen Burgess, Amit Rastogi, Paul Rich, Nicholas Rimmer | 2012-12-25 |