Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11961722 | Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor deposition | Anthony Wilby, Steve Burgess, Ian Moncrieff, Clive Widdicks, Scott Haymore | 2024-04-16 |
| 11913109 | Apparatus and a method of controlling thickness variation in a material layer formed using physical vapour deposition | Tony Wilby, Steve Burgess, Adrian Mark Thomas, Scott Haymore, Clive Widdicks +1 more | 2024-02-27 |
| 11875980 | Method and apparatus for depositing a material | Stephen Burgess, Amit Rastogi, Eduardo Paulo Lima, Clive Widdicks, Paul Rich +2 more | 2024-01-16 |
| 11718908 | DC magnetron sputtering | Scott Haymore, Amit Rastogi, Steve Burgess, Ian Moncrieff | 2023-08-08 |
| 11521840 | Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor deposition | Anthony Wilby, Steve Burgess, Ian Moncrieff, Clive Widdicks, Scott Haymore | 2022-12-06 |
| 11008651 | DC magnetron sputtering | Scott Haymore, Amit Rastogi, Steve Burgess, Ian Moncrieff, Chris Kendal | 2021-05-18 |
| 10900114 | Method and apparatus for depositing a material | Stephen Burgess, Amit Rastogi, Eduardo Paulo Lima, Clive Widdicks, Paul Rich +2 more | 2021-01-26 |
| 10812035 | SAW device and method of manufacture | Steve Burgess | 2020-10-20 |
| 10601388 | Method of deposition | Stephen Burgess, Amit Rastogi, Scott Haymore, Constanine Fragos | 2020-03-24 |
| 9803272 | Deposition of silicon dioxide | Yun Zhou, Stephen Burgess | 2017-10-31 |
| 9670574 | Methods of depositing aluminium layers | Stephen Burgess | 2017-06-06 |