Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9783886 | PE-CVD apparatus and method | Daniel Archard, Stephen Burgess, Mark Carruthers, Andrew Price, Katherine Crook | 2017-10-10 |
| 7199474 | Damascene structure with integral etch stop layer | Joon-Chai Yeoh | 2007-04-03 |
| 6933246 | Dielectric film | Joon-Chai Yeoh | 2005-08-23 |
| 6660140 | Sputtering apparatus | Stephen Burgess, Paul Rich | 2003-12-09 |
| 6179974 | Apparatus and methods for sputtering | — | 2001-01-30 |
| 6174823 | Methods of forming a barrier layer | Christopher Dobson, Mark Graeme Martin Harris | 2001-01-16 |