Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6579796 | Method of etching platinum using a silicon carbide mask | Chentsau Ying, Jeng H. Hwang | 2003-06-17 |
| 6014979 | Localizing cleaning plasma for semiconductor processing | Stefan LANG | 2000-01-18 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6579796 | Method of etching platinum using a silicon carbide mask | Chentsau Ying, Jeng H. Hwang | 2003-06-17 |
| 6014979 | Localizing cleaning plasma for semiconductor processing | Stefan LANG | 2000-01-18 |