Issued Patents All Time
Showing 1–25 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8518184 | Methods and systems for controlling temperature during microfeature workpiece processing, E.G., CVD deposition | Kevin L. Beaman, Trung T. Doan, Lyle Breiner, Ronald A. Weimer, Er-Xuan Ping +2 more | 2013-08-27 |
| 8384192 | Methods for forming small-scale capacitor structures | Trung T. Doan, Lyle Breiner, Er-Xuan Ping, Kevin L. Beaman, Ronald A. Weimer +2 more | 2013-02-26 |
| 8120124 | Ultra thin TCS (SiCl4) cell nitride for DRAM capacitor with DCS (SiH2Cl2) interface seeding layer | Er-Xuan Ping | 2012-02-21 |
| 8013371 | Ultra thin TCS (SiCl4) cell nitride for DRAM capacitor with DCS (SiH2Cl2) interface seeding layer | Er-Xuan Ping | 2011-09-06 |
| 7906393 | Methods for forming small-scale capacitor structures | Trung T. Doan, Lyle Breiner, Er-Xuan Ping, Kevin L. Beaman, Ronald A. Weimer +2 more | 2011-03-15 |
| 7771537 | Methods and systems for controlling temperature during microfeature workpiece processing, E.G. CVD deposition | Kevin L. Beaman, Trung T. Doan, Lyle Breiner, Ronald A. Weimer, Er-Xuan Ping +2 more | 2010-08-10 |
| 7754576 | Method of forming inside rough and outside smooth HSG electrodes and capacitor structure | — | 2010-07-13 |
| 7647886 | Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers | David J. Kubista, Trung T. Doan, Lyle Breiner, Ronald A. Weimer, Kevin L. Beaman +2 more | 2010-01-19 |
| 7528435 | Semiconductor constructions | Er-Xuan Ping | 2009-05-05 |
| 7459746 | Method of forming inside rough and outside smooth HSG electrodes and capacitor structure | — | 2008-12-02 |
| 7422635 | Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces | Trung T. Doan, Lyle Breiner, Er-Xuan Ping, Kevin L. Beaman, Ronald A. Weimer +2 more | 2008-09-09 |
| 7378313 | Methods of fabricating double-sided hemispherical silicon grain electrodes and capacitor modules | — | 2008-05-27 |
| 7351640 | Methods of fabricating double-sided hemispherical silicon grain electrodes and capacitor modules | — | 2008-04-01 |
| 7344755 | Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers | Kevin L. Beaman, Ronald A. Weimer, Lyle Breiner, Er-Xuan Ping, Trung T. Doan +2 more | 2008-03-18 |
| 7279398 | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces | Cem Basceri, Trung T. Doan, Ronald A. Weimer, Kevin L. Beaman, Lyle Breiner +3 more | 2007-10-09 |
| 7258892 | Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition | Kevin L. Beaman, Trung T. Doan, Lyle Breiner, Ronald A. Weimer, Er-Xuan Ping +2 more | 2007-08-21 |
| 7247581 | Methods for treating pluralities of discrete semiconductor substrates | Trung T. Doan, Lyle Breiner, Er-Xuan Ping | 2007-07-24 |
| 7235138 | Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces | Trung T. Doan, Lyle Breiner, Er-Xuan Ping, Ronald A. Weimer, David J. Kubista +2 more | 2007-06-26 |
| 7233042 | Method of forming inside rough and outside smooth HSG electrodes and capacitor structure | — | 2007-06-19 |
| 7220312 | Methods for treating semiconductor substrates | Trung T. Doan, Lyle Breiner, Er-Xuan Ping | 2007-05-22 |
| 7214981 | Semiconductor devices having double-sided hemispherical silicon grain electrodes | — | 2007-05-08 |
| 7183208 | Methods for treating pluralities of discrete semiconductor substrates | Trung T. Doan, Lyle Breiner, Er-Xuan Ping | 2007-02-27 |
| 7148118 | Methods of forming metal nitride, and methods of forming capacitor constructions | Er-Xuan Ping | 2006-12-12 |
| 7112544 | Method of atomic layer deposition on plural semiconductor substrates simultaneously | Trung T. Doan, Lyle Breiner, Er-Xuan Ping | 2006-09-26 |
| 7056806 | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces | Cem Basceri, Trung T. Doan, Ronald A. Weimer, Kevin L. Beaman, Lyle Breiner +3 more | 2006-06-06 |