Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12134556 | Semiconductor device and method for manufacturing a semiconductor device | Enri Duqi, Lorenzo Baldo, Paolo Ferrari, Benedetto Vigna, Flavio Francesco Villa +1 more | 2024-11-05 |
| 11128958 | Method for manufacturing a semiconductor die provided with a filtering module, semiconductor die including the filtering module, package housing the semiconductor die, and electronic system | Giorgio ALLEGATO, Federico VERCESI, Laura Oggioni, Matteo Perletti | 2021-09-21 |
| 11001061 | Method for manufacturing microfluid delivery device | Dino Faralli, Paolo Ferrari, Marta Carminati | 2021-05-11 |
| 10649202 | Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof | Sonia Costantini, Marta Carminati, Daniela Angela Luisa Gatti, Roberto Carminati | 2020-05-12 |
| 10322931 | Dry scribing methods, devices and systems | Matteo Perletti, Pietro Petruzza, Ilaria Gelmi | 2019-06-18 |
| 10197794 | Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof | Sonia Costantini, Marta Carminati, Daniela Angela Luisa Gatti, Roberto Carminati | 2019-02-05 |
| 9731965 | Dry scribing methods, devices and systems | Matteo Perletti, Pietro Petruzza, Ilaria Gelmi | 2017-08-15 |
| 9469109 | Microfluid delivery device and method for manufacturing the same | Dino Faralli, Paolo Ferrari, Marta Carminati | 2016-10-18 |
| 9321628 | MEMS device incorporating a fluidic path, and manufacturing process thereof | Dino Faralli, Benedetto Vigna | 2016-04-26 |
| 9233834 | MEMS device having a suspended diaphragm and manufacturing process thereof | Dino Faralli, Paolo Ferrari | 2016-01-12 |
| 8988155 | Oscillator device and manufacturing process of the same | Giorgio ALLEGATO, Paolo Ferrari, Benedetto Vigna | 2015-03-24 |
| 6395618 | Method for manufacturing integrated structures including removing a sacrificial region | Paolo Vergani, Ilaria Gelmi, Pietro Montanini, Marco Ferrera | 2002-05-28 |
| 6331444 | Method for manufacturing integrated devices including electromechanical microstructures, without residual stress | Paolo Ferrari, Benedetto Vigna, Pietro Montanini, Marco Ferrera | 2001-12-18 |
| 6197655 | Method for manufacturing integrated structures including removing a sacrificial region | Pietro Montanini, Marco Ferrera, Ilaria Gelmi | 2001-03-06 |