Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12078799 | Hermetically sealed MEMS mirror and method of manufacture | Giorgio ALLEGATO, Federico VERCESI, Roberto Carminati | 2024-09-03 |
| 11681141 | MEMS device having a tiltable suspended structure controlled by electromagnetic actuation | Roberto Carminati, Riccardo Gianola, Linda Montagna, Francesca Maria Carla Carpignano | 2023-06-20 |
| 11675186 | Hermetically sealed MEMS mirror and method of manufacture | Giorgio ALLEGATO, Federico VERCESI, Roberto Carminati | 2023-06-13 |
| 11440794 | Process for manufacturing a microelectromechanical device with a mobile structure, in particular a micromirror | Davide ASSANELLI, Aldo Luigi Bortolotti, Michele VIMERCATI, Igor Varisco | 2022-09-13 |
| 10962431 | Pressure sensor generating a transduced signal with reduced ambient temperature dependence, and manufacturing method thereof | Enri Duqi, Sebastiano Conti | 2021-03-30 |
| 10914938 | Oscillating structure with reduced dynamic deformation, optical device including the oscillating structure, and method of manufacturing the oscillating structure | Roberto Carminati, Marta Carminati | 2021-02-09 |
| 10809140 | Pressure sensor generating a transduced signal with reduced ambient temperature dependence, and manufacturing method thereof | Enri Duqi, Sebastiano Conti | 2020-10-20 |
| 10746982 | Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof | Benedetto Vigna, Marco Ferrera, Marco Salina | 2020-08-18 |
| 10649202 | Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof | Marta Carminati, Daniela Angela Luisa Gatti, Laura Maria Castoldi, Roberto Carminati | 2020-05-12 |
| 10473920 | Hermetically sealed MEMS mirror and method of manufacture | Giorgio ALLEGATO, Federico VERCESI, Roberto Carminati | 2019-11-12 |
| 10197794 | Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof | Marta Carminati, Daniela Angela Luisa Gatti, Laura Maria Castoldi, Roberto Carminati | 2019-02-05 |
| 9921405 | Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof | Benedetto Vigna, Marco Ferrera, Marco Salina | 2018-03-20 |
| 9753279 | Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof | Benedetto Vigna, Marco Ferrera, Marco Salina | 2017-09-05 |
| 9544573 | Mirror micromechanical structure and related manufacturing process | Roberto Carminati, Sebastiano Conti | 2017-01-10 |