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Pressure sensor generating a transduced signal with reduced ambient temperature dependence, and manufacturing method thereof |
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Hermetically sealed MEMS mirror and method of manufacture |
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2019-11-12 |
| 10197794 |
Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof |
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2019-02-05 |
| 9921405 |
Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof |
Benedetto Vigna, Marco Ferrera, Marco Salina |
2018-03-20 |
| 9753279 |
Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof |
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