Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7667829 | Optical property measurement apparatus and optical property measurement method, exposure apparatus and exposure method, and device manufacturing method | Toru Fujii, Yasushi Mizuno | 2010-02-23 |
| 6296977 | Method for the measurement of aberration of optical projection system | Toshio Tsukakoshi, Tsunehito Hayashi | 2001-10-02 |
| 5666205 | Measuring method and exposure apparatus | Hiroki Tateno, Kyoichi Suwa, Yuji Imai | 1997-09-09 |