Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125176 | Inspection apparatus and measurement apparatus | Masayoshi Ishikawa, Yasuhiro Yoshida, Hiroyuki Shindo | 2024-10-22 |
| 10937669 | Substrate solution-treatment apparatus, treatment solution supplying method and storage medium | Mikio Nakashima, Kazuyoshi Shinohara, Hiroyuki Higashi | 2021-03-02 |