Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12233441 | Ultraviolet and ozone cleaning apparatus and method of using | Banqiu Wu, Eliyahu Shlomo DAGAN | 2025-02-25 |
| 12159782 | Ultraviolet and ozone clean system | Banqiu Wu, Hiroki Ogawa, Eliyahu Shlomo DAGAN | 2024-12-03 |
| 12128456 | Megasonic clean with cavity property monitoring | Banqiu Wu, Eliyahu Shlomo DAGAN | 2024-10-29 |
| 12085849 | Baking chamber with shroud for mask clean | Banqiu Wu, Eliyahu Shlomo DAGAN | 2024-09-10 |
| 11921422 | Single-volume baking chamber for mask clean | Banqiu Wu, Eliyahu Shlomo DAGAN | 2024-03-05 |
| 11803118 | Methods and apparatus for photomask processing | Banqiu Wu, Eliyahu Shlomo DAGAN | 2023-10-31 |
| 11798799 | Ultraviolet and ozone clean system | Banqiu Wu, Hiroki Ogawa, Eliyahu Shlomo DAGAN | 2023-10-24 |
| 11654460 | Megasonic clean with cavity property monitoring | Banqiu Wu, Eliyahu Shlomo DAGAN | 2023-05-23 |
| 11644748 | Multi-volume baking chamber for mask clean | Banqiu Wu, Eliyahu Shlomo DAGAN | 2023-05-09 |
| 11114350 | Method for removing photoresist from photomask substrate | Banqiu Wu, Eli DAGAN | 2021-09-07 |
| 10962889 | Method and apparatus for high throughput photomask curing | Banqiu Wu, Eli DAGAN, Bruce J. Fender | 2021-03-30 |
| 10928724 | Attachment feature removal from photomask in extreme ultraviolet lithography application | Banqiu Wu, Eli DAGAN, Bruce J. Fender | 2021-02-23 |
| 7297286 | Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants | Adel George Tannous | 2007-11-20 |
| 7101260 | Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants | Adel George Tannous | 2006-09-05 |
| 7066789 | Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants | Adel George Tannous | 2006-06-27 |
| 7040961 | Methods for resist stripping and cleaning surfaces substantially free of contaminants | Mohamed Boumerzoug, Adel George Tannous | 2006-05-09 |
| 6945853 | Methods for cleaning utilizing multi-stage filtered carbon dioxide | Goodarz Ahmadi, Paul Lewis, Adel George Tannous | 2005-09-20 |
| 6764385 | Methods for resist stripping and cleaning surfaces substantially free of contaminants | Mohamed Boumerzoug, Adel George Tannous | 2004-07-20 |
| 6719613 | Methods for cleaning surfaces substantially free of contaminants utilizing filtered carbon dioxide | Goodarz Ahmadi, Paul Lewis, Adel George Tannous, Keith H. Compton | 2004-04-13 |
| 6543462 | Apparatus for cleaning surfaces substantially free of contaminants | Paul Lewis, Goodarz Ahmadi, Adel George Tannous, Keith H. Compton | 2003-04-08 |
| 6530823 | Methods for cleaning surfaces substantially free of contaminants | Goodarz Ahmadi, Paul Lewis, Adel George Tannous, Keith H. Compton | 2003-03-11 |
| 6427096 | Processing tool interface apparatus for use in manufacturing environment | Paul Lewis, Adel George Tannous, Karl A. Davlin | 2002-07-30 |
| 6249990 | Method and apparatus for transporting articles | Adel George Tannous, Jeffrey D. Miller | 2001-06-26 |