Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12233441 | Ultraviolet and ozone cleaning apparatus and method of using | Banqiu Wu, Khalid Makhamreh | 2025-02-25 |
| 12159782 | Ultraviolet and ozone clean system | Banqiu Wu, Khalid Makhamreh, Hiroki Ogawa | 2024-12-03 |
| 12128456 | Megasonic clean with cavity property monitoring | Banqiu Wu, Khalid Makhamreh | 2024-10-29 |
| 12085849 | Baking chamber with shroud for mask clean | Banqiu Wu, Khalid Makhamreh | 2024-09-10 |
| 11921422 | Single-volume baking chamber for mask clean | Banqiu Wu, Khalid Makhamreh | 2024-03-05 |
| 11803118 | Methods and apparatus for photomask processing | Banqiu Wu, Khalid Makhamreh | 2023-10-31 |
| 11798799 | Ultraviolet and ozone clean system | Banqiu Wu, Khalid Makhamreh, Hiroki Ogawa | 2023-10-24 |
| 11654460 | Megasonic clean with cavity property monitoring | Banqiu Wu, Khalid Makhamreh | 2023-05-23 |
| 11644748 | Multi-volume baking chamber for mask clean | Banqiu Wu, Khalid Makhamreh | 2023-05-09 |